|本期目录/Table of Contents|

[1]张慧,石建超,张雯,等.电容式微超声换能器等效电路模型与阵元优化[J].天津大学学报(自然科学版),2016,(11):1209-1215.[doi:10.11784/tdxbz201511007]
 Zhang Hui,Shi Jianchao,Zhang Wen,et al.Equivalent Circuit Model and Element Optimization of CMUT[J].Journal of Tianjin University,2016,(11):1209-1215.[doi:10.11784/tdxbz201511007]
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电容式微超声换能器等效电路模型与阵元优化()
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《天津大学学报(自然科学版)》[ISSN:0493-2137/CN:12-1127/N]

卷:
期数:
2016年11
页码:
1209-1215
栏目:
精密仪器与光电子工程
出版日期:
2016-11-15

文章信息/Info

Title:
Equivalent Circuit Model and Element Optimization of CMUT
作者:
张慧1 石建超1 张雯1 曾周末1 綦磊2
1. 天津大学精密测试技术与仪器国家重点实验室,天津 300072;2. 北京卫星环境工程研究所,北京 100094
Author(s):
Zhang Hui1 Shi Jianchao1 Zhang Wen1 Zeng Zhoumo1 Qi Lei2
1. State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
2. Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China
关键词:
微机电系统 电容式微超声换能器 非线性等效电路模型 辐射阻抗
Keywords:
micro-electromechanical systems capacitive micromachined ultrasonic transducers(CMUT) nonlinear equivalent circuit model radiation impedance
分类号:
TP212
DOI:
10.11784/tdxbz201511007
文献标志码:
A
摘要:
针对电容式微超声换能器(CMUT)建立了非线性等效电路模型. 以声源表面运动方程为理论基础, 将CMUT的声学、力学参数等效成电学元器件, 分别建立CMUT单振膜与多振膜阵元的等效电路模型, 分析多振膜阵元中振膜间的声场干扰, 计算了振膜的辐射阻抗; 并且在模型中构造了辐射阻抗等效RLC电路. 利用SPICE软件对CMUT的等效电路模型进行仿真分析, 得出了CMUT振膜的振动位移幅值频域响应; 通过多普勒测振系统测量多膜CMUT阵元中不同位置振膜的频率响应, 验证了所建立模型的正确性. 利用该非线性等效电路模型, 对2×2、3×3与4×4这3种方形排布的CMUT阵元进行优化设计, 得到了3种规模阵元振膜的最佳间距分别为230 μm、160 μm与130 μm.
Abstract:
A nonlinear equivalent circuit model for capacitive micromachined ultrasonic transducers(CMUT)was proposed. The equivalent circuit model is based on vibration surface motion equations,and the mechanical and acoustic parameters are equivalent to electricity components. It can be used to analyze both a single CMUT cell and CMUT cells in element. Considering acoustic interaction effects,the radiation impedance of CMUTs was accurately calculated and represented using an RLC circuit in the model. The frequency response of CMUT membrane vibration displacement amplitude was obtained by using SPICE simulation and the frequency response of cells located at different positions in one element was measured by Doppler vibrometer to verify the equivalent circuit model. Three types of elements are designed whose cells are arranged in 2×2,3×3 and 4×4 square array. The optimal pitch of cells in the three types of elements is 230 μm,160 μm and 130 μm respectively.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期: 2015-11-02; 修回日期: 2015-12-14.
基金项目: 国家自然科学基金资助项目(61201039); 天津科技支撑计划资助项目(14ZCZDGX00003).
作者简介: 张慧(1975—), 女, 博士, 副教授.
通讯作者: 张慧, hzhang@tju.edu.cn.
网络出版时间: 2016-01-22.网络出版地址: http://www.cnki.net/kcms/detail/12.1127.N.20160122.1033.006.html.
更新日期/Last Update: 2016-11-10