|本期目录/Table of Contents|

State-of-the-art and recent developments in micro/nanoscale pressure
sensors for smart wearable devices and health monitoring systems
(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2020年1期
页码:
43-52
栏目:
出版日期:
2020-03-15

文章信息/Info

Title:
State-of-the-art and recent developments in micro/nanoscale pressure
sensors for smart wearable devices and health monitoring systems
作者:
-
Author(s):
 Ye Chang Jingjing Zuo Hainan Zhang Xuexin Duan ?(段学欣)
 State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China
关键词:
-
Keywords:
M/NEMS
Pressure sensor
Flexible sensor
Piezoresistive sensor
Capacitive sensor
Piezoelectric sensor
Resonant sensor
2D material
分类号:
-
DOI:
https://doi.org/10.1016/j.npe.2019.12.006
文献标识码:
A
摘要:
Abstract:
Small-sized, low-cost, and high-sensitivity sensors are required for pressure-sensing applications because of their
critical role in consumer electronics, automotive applications, and industrial environments. Thus, micro/nanoscale
pressure sensors based on micro/nanofabrication and micro/nanoelectromechanical system technologies
have emerged as a promising class of pressure sensors on account of their remarkable miniaturization and performance.
These sensors have recently been developed to feature multifunctionality and applicability to novel
scenarios, such as smart wearable devices and health monitoring systems. In this review, we summarize the
major sensing principles used in micro/nanoscale pressure sensors and discuss recent progress in the development
of four major categories of these sensors, namely, novel material-based, flexible, implantable, and selfpowered
pressure sensors.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2020-04-30