|本期目录/Table of Contents|

Nonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2019年2期
页码:
77-82
栏目:
出版日期:
2019-06-15

文章信息/Info

Title:
 Nonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer
作者:
Tong Guo * Qianwen Weng Bei Luo Jinping Chen Xing Fu Xiaotang Hu
State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
Author(s):
 Tong Guo * Qianwen Weng Bei Luo Jinping Chen Xing Fu Xiaotang Hu
关键词:
White light spectral interferometry
Thin
fi lm thickness measurement
Nonlinear phase
Equivalent thickness
Transparent medium
Keywords:
-
分类号:
-
DOI:
-
文献标识码:
A
摘要:
A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin fi lm thickness through transparent medium. In practical work, the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors. Adding a transparent medium also increases the equivalent thickness. The simulation results show that the equivalent thickness has a signi fi cant effect on thin fi lm thickness measurements. Therefore, it is necessary to perform wavelength correction to provide a
constant equivalent thickness for beam splitters. In the experiments, some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin
fi lm thickness of 1052.2±0.9 nm was tested through the transparent medium. The results demonstrate that our system has a nanometer-level accuracy for thin fi lm thickness measurement through transparent medium with optical path compensation.
Abstract:

参考文献/References

备注/Memo

备注/Memo:
Corresponding author.
E-mail address: guotong@tju.edu.cn (T. Guo).
更新日期/Last Update: 2019-10-20