|本期目录/Table of Contents|

Self-Adaptive Grinding for Blind Tip Reconstruction of AFM Diamond Probe(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2018年2期
页码:
150-155
栏目:
出版日期:
2018-06-15

文章信息/Info

Title:
Self-Adaptive Grinding for Blind Tip Reconstruction of AFM Diamond Probe
作者:
-
Author(s):
Linyan Xu1* Qishan Guo2 Shuangbei Qian Sen Wu
State Key Laboratory of Precision Measuring Technology and Instruments (Tianjin University), Tianjin 300072, China
关键词:
-
Keywords:
AFM diamond probe BTR Cone characterizer Self-adaptive Grinding
分类号:
-
DOI:
10.13494/j.npe.20170010
文献标识码:
A
摘要:
-
Abstract:
Blind tip reconstruction (BTR) method is one of the favorable methods to estimate the atomic force microscopy (AFM) probe shape. The exact shape of the characterizer is not required for BTR, while the geometry of the sample may affect the reconstruction significantly. A cone-shaped array sample was chosen as a characterizer to be evaluated. The target AFM probe to be reconstructed was a diamond triangular pyramid probe with two feature angles, namely front angle (FA) and back angle (BA). Four conical structures with different semi-angles
were dilated by the pyramid probe. Simulation of scanning process demonstrates that it is easy to judge from the images of the isolated rotary structure, cone-shaped, the suitability of the sample to be a tip characterizer for a pyramid probe. The cone-shaped array sample was repeatedly scanned 50 times by the diamond probe using an AFM. The series of scanning images shrank gradually and more information of the probe was exhibited in the images, indicating that the characterizer has been more suitable for BTR. The feature angle FA of the
characterizer increasingly reduces during the scanning process. A self-adaptive grinding between the probe and the characterizer contributes to BTR of the diamond pyramid probe.

参考文献/References

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备注/Memo

备注/Memo:
Article history:
Received 2017-12-01
received in revised form 2017-12-26
accepted 2018-01-05
Available online
Corresponding author.
E-mail address: xulinyan@tju.edu.cn (Linyan Xu)
Peer review under responsibility of Tianjin University.
更新日期/Last Update: 2018-09-21