|本期目录/Table of Contents|

Analysis of Vibrational Performance of A Piezoelectric Micropump with Diffuse/Nozzle Microchannel(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2018年2期
页码:
138-144
栏目:
出版日期:
2018-06-15

文章信息/Info

Title:
Analysis of Vibrational Performance of A Piezoelectric Micropump with Diffuse/Nozzle Microchannel
作者:
-
Author(s):
Yanfang Guan* Xiang Li
School of Mechanical and Electrical Engineering, Henan University of Technology, Zhengzhou 450001, China
关键词:
-
Keywords:
Micropump Vibrational displacement Piezoelectric transducer Microflow
分类号:
-
DOI:
10.13494/j.npe.20170014
文献标识码:
A
摘要:
-
Abstract:
Piezoelectric transducers of different external diameters are designed and fabricated and incorporated into micropumps. Through finite element analysis, it is shown that the volume efficiency of the micropump reaches its maximum value for the first mode of vibration. The variation of maximum displacement with frequency is determined under free and forced vibration. Results demonstrate that this variation shows the same trend for different driving waves at the same driving voltage. The maximum displacement under forced vibration is less than that under free vibration. The displacement increases with decreasing distance from the center of the transducer. The maximum displacement is inversely proportional to the diameter of the transducer and proportional to the driving voltage under both free and forced vibrations. Finally, the micropump flow rate and pressure are measured and are found to manifest the same trend as the maximum displacement under the same driving conditions. For a piezoelectric transducer of 12 mm external diameter, the maximum flow rate and pressure value are 150 μL/min and 346 Pa, respectively, under sine-wave driving at 100 Vpp driving voltage.

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备注/Memo

备注/Memo:
Article history:
Received 2017-11-08
received in revised form 2018-03-24
accepted 2018-04-01
Available online
Corresponding author.
E-mail address: sgyffg@126.com (Yanfang Guan)
Peer review under responsibility of Tianjin University.
更新日期/Last Update: 2018-09-21