|本期目录/Table of Contents|

An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2018年2期
页码:
129-132
栏目:
出版日期:
2018-06-15

文章信息/Info

Title:
An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators
作者:
-
Author(s):
Chuanhai Gao Yuan Jiang Lin Zhang Bohua Liu* Menglun Zhang
State Key Laboratory of Precision Measuring Technology and Instruments(Tianjin University), Tianjin 300072, China
关键词:
-
Keywords:
Film bulk acoustic reson Mason model Flexible resonator Acoustic reflection
分类号:
-
DOI:
10.13494/j.npe.20180011
文献标识码:
A
摘要:
-
Abstract:
This paper investigates the issues on acoustic energy reflection of flexible film bulk acoustic resonators (FBARs). The flexible FBAR was fabricated with an air cavity in the polymer substrate, which endowed the resonator with efficient acoustic reflection and high electrical performance. The acoustic wave propagation and reflection in FBAR were first analyzed by Mason model, and then flexible FBARs of 2.66 GHz series resonance in different configurations were fabricated. To validate efficient acoustic reflection of flexible resonators, FBARs were transferred onto different polymer substrates without air cavities. Experimental results indicate that efficient acoustic reflection can be  efficiently predicted by Mason model. Flexible FBARs with air cavities exhibit a higher figure of merit (FOM). Our demonstration provides a feasible solution to flexible MEMS devices with highly efficient acoustic reflection (i.e. energy preserving) and free-moving cavities, achieving both high flexibility and high electrical performance.

参考文献/References

[1]  Satoh Y, Nishihara T, Yokoyama T, et al. Development of piezoelectric thin film resonator and its impact on future wireless communication systems. Jap Journal of Applied Physics, 2005, 44(5A): 2883-2894.
[2]   Chang Y, Tang N, Qu H, et al. Detection of volatile organic compounds by self-assembled monolayer coated sensor array with concentration-independent fingerprints. Scientific Reports, 2016, 6: 23970-1-12.
[3]   Wang SH, Xu J, Wang W C, et al. Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nat Lett, 2018, 555(7694): 83-88.
[4]   Tsuyoshi Sekitani, Takao Someya. Stretchable, large-area organic electronics. Adv Mater, 2010, 22(20):2228-2246.
[5]   Chen J, He X, Wang W, et al. Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates. J Mater Chem C, 2014, 2(43): 9109-9114.
[6]   Akiyama M, Morofuji Y, Kamohara T, et al. Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films. J Appl Phys, 2006, 100(11):114318-1-5.
[7]   Jin H, Zhou J, He X, et al. Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications. Sci Rep, 2013, 3(2): 2140-1-8.
[8]   Chen G, Zhao X, Wang X, et al. Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer. Sci Rep, 2015, 5: 9510-1-8.
[9]   Jiang Y, Zhang M, Duan X, et al. A flexible, gigahertz, and free-standing thin film piezoelectric MEMS resonator with high figure of merit. Applied Physics Letters, 2017, 111(2): 023505.
[10]  Zhang L, Jiang Y, Liu B, et al. Highly flexible piezoelectric MEMS resonators encapsulated in polymer thin films. 2018  IEEE 31st International Conference on Micro-Electro-Mechanical Systems (MEMS). Belfast, Northern Ireland, 2018, 978-1-5386-4782-0/18: 170-173.
[11]  Jiang Y, Zhao Y, Zhang L, et al. Flexible film bulk acoustic wave filters toward radiofrequency wireless communication. Small, 2018, 1703644-1-5.
[12]  Hashimoto Ken-ya. RF Bulk Acoustic Wave Filters for Communications. London: Artech House, 2009.
[13]  Carson A, Bowen AM, Huang YG, et al. Transfer printing techniques for materials assembly and micro/nanodevice fabrication. Adv Mater, 2012, 24(39): 5284-5318.
[14]  Pillai G, Zope AA, Tai J ML, et al. An apodized 3-GHz thin film piezoelectric on substrate FBAR. 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium.Besançon, France, 2017: 551-553.
[15]  Rosenbaum JF. Bulk Acoustic Wave Theory and Devices. London: Artech House, 1988.

备注/Memo

备注/Memo:
Article history:
Received 2018-04-03
received in revised form 2018-05-26
accepted 2018-05-30
Available online
Corresponding author.
E-mail address: bohua.liu@tju.edu.cn (Bohua Liu)
Peer review under responsibility of Tianjin University.
更新日期/Last Update: 2018-09-21