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工业CT二维空间分辨力的校准方法(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2017年6期
页码:
494-498
栏目:
出版日期:
2017-11-15

文章信息/Info

Title:
A Method of Calibrating Spatial Resolution of Industrial CT
文章编号:
1672-6030(2017)06-0494-05
作者:
陈思文1 施玉书2 张欣宇3 崔芳芳1 宋旭4 高思田5 胡晓东1
1. 天津大学精密仪器与光电子工程学院, 天津 300072; 2. 中国计量科学研究院纳米新材料计量研究所, 北京 100029;3. 广东省计量科学研究院长度室,广州 510405; 4. 中国商飞上海飞机设计研究院,上海 201210;5. 中国计量科学研究院长度计量科学与精密机械测量技术研究所,北京 100029
Author(s):
Chen Siwen1 Shi Yushu2 Zhang Xinyu3 Cui Fangfang1 Song Xu4 Gao Sitian5 Hu Xiaodong1
1. School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China; 2. Division of Nano Metrology and Materials Measurement, National Institute of Metrology, Beijing 100029, China; 3. Room of Length, Guangdong Provincial Institute of Metrology, Guangzhou 510405, China; 4. Shanghai Aircraft Design and Research Institute, COMAC, Shanghai 201210, China; 5. National Institute of Metrology, Beijing 100029, China
关键词:
工业CT 空间分辨力 线对卡 调制传递函数 图像处理 校准实验
Keywords:
industrial CT spatial resolution cards with line pairs modulation transfer function image processing calibration experiment
分类号:
TB92
DOI:
10.13494/j.npe.20150137
文献标识码:
A
摘要:
工业CT的空间分辨力是指从CT图像中能够分辨特定的最小几何细节的能力,是评价一台工业CT系统测量能力的重要参数之一.为了提升工业CT的测量能力及成像质量,需要对其空间分辨力进行校准实验.针对这一问题设计出栅格形及交叉形分辨力线对卡,使用光刻工艺完成其研制过程,并基于此结合本底校正等图像处理方法进行了系统二维空间分辨力校准实验,通过调制传递函数MTF计算出实验系统的空间分辨力数值,验证了此方法可用于校准CT分辨力的实验意义.最后,对如何提升测量准确度的问题进行了探讨.
Abstract:
Spatial resolution of industrial CT indicates the ability to distinguish the minimum specific geometric details from CT images, which represents one of the most important parameters of measurement capability assessment of an industrial CT. Spatial resolution of industrial CT demands calibration in order to enhance the measurement capability and image quality of industrial CT. Regarding this problem, a set of grid and cross resolution line pairs cards were designed and manufactured via lithography, and on that basis, the 2D system spatial resolution was calibrated with specific image processing methods such as background correction. Experimental results prove that this method can be applied to calibrating spatial resolution of industrial CT by calculation of system spatial resolution through modulation transfer function. At last, some issues on improving measurement accuracy were discussed.

参考文献/References

备注/Memo

备注/Memo:
收稿日期: 2017-09-10. 作者简介: 陈思文(1992—),男,硕士研究生. 通讯作者: 胡晓东,教授,xdhu@tju.edu.cn.
更新日期/Last Update: 2017-12-21