|本期目录/Table of Contents|

 基于Linnik型白光显微干涉光谱测量方法(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2017年5期
页码:
360-365
栏目:
精密测量
出版日期:
2017-09-15

文章信息/Info

Title:
 White Light Microscopic Spectral Interferometric Measuring
Method Based on Linnik Type
文章编号:
1672-6030(2017)05-0360-06
作者:
 郭彤 周勇 李明惠 吴菊红 傅星 胡小唐
 (精密测试技术及仪器国家重点实验室(天津大学),天津300072)
Author(s):
 Guo Tong Zhou Yong Li Minghui Wu Juhong Fu Xing Hu Xiaotang
 (State Key Laboratory of Precision Measuring Technology and Instruments (Tianjin University), Tianjin 300072, China)
关键词:
 Linnik型 白光干涉光谱 薄膜 非线性相位修正
Keywords:
 Linnik type white light interference spectra thin film nonlinear phase correction
分类号:
TH741
DOI:
10.13494/j.npe.20160103
文献标识码:
A
摘要:
 针对在复杂测量环境下实现薄膜类样品的高精度测量需求,基于白光干涉光谱测量理论,搭建了Linnik型白光显微干涉光谱测量系统,该系统具有较长的工作距离.系统采用5步相移算法实现相位信息的精确提取,通过对绝对距离以及标准薄膜样品的测试,验证了方法的可行性,并在此基础上利用系统实现了对微结构表面形貌和不同材料薄膜厚度的纳米级精度测量.
Abstract:
 Regarding the requirements for high precision measurement of thin film specimens in complex conditions, a Linnik type measuring system with long working distance was built based on white light microscopic spectral interferometry. Fivestep phaseshifting algorithm was adopted to extract accurate phase information in the measuring system. Several experiments were conducted to measure the absolute distance and standard thin film thickness, verifying the feasibility of the system. And it has been achieved that the system can measure the surface topography and thin film thickness with nanoscale accuracy.

参考文献/References

备注/Memo

备注/Memo:
收稿日期: 2017-06-30.
基金项目: 国家重点研发计划重点资助项目(2017YFF0105905).
作者简介: 郭彤(1977— ),男,博士,副教授.
通讯作者: 郭彤,guotong@tju.edu.cn.
更新日期/Last Update: 2017-09-27