|本期目录/Table of Contents|

熔石英光学元件纳米划痕亚表面损伤特性(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2017年1期
页码:
7-14
栏目:
纳米技术
出版日期:
2017-01-15

文章信息/Info

Title:
Subsurface Damage Properties of Nano Scratches in Fused Silica Optics
作者:
钟曜宇 戴一帆 石峰 隋婷婷
国防科学技术大学机电工程与自动化学院, 长沙410073
Author(s):
Zhong Yaoyu Dai Yifan Shi Feng Sui Tingting
College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China
关键词:
熔石英 激光损伤阈值 划痕 时域有限差分算法
Keywords:
fused silica laserinduced damage threshold scratch finite difference time domain (FDTD) algorithm
分类号:
TG580
DOI:
10.13494/j.npe.20160016
文献标识码:
A
摘要:
为了实现熔石英光学元件激光损伤阈值的提升,本文分析了划痕对熔石英激光损伤的影响,利用纳米压痕实验区分塑脆划痕,通过时域有限差分(FDTD)算法仿真给出不同深度、不同宽深比的划痕对光场调制的影响结果,最后选取典型划痕进行R-on-1激光阈值测试实验.结果表明,深度在53 nm以下的塑性划痕对激光损伤无影响,处于塑脆转变阶段的划痕有一定几率诱导损伤,脆性划痕处损伤阈值远远低于基底阈值,仅为基底阈值的43.1%,是降低光学元件激光损伤阈值的重要因素.实验数据与理论仿真具有一致性.
Abstract:
To enhance the laserinduced damage threshold of fused silica optics , the impact of scratches on laserinduced damage is analyzed in this paper. Nanoindentation experiments were carried out to differentiate a variety of plasticbrittle scratches. Then finite difference time domain (FDTD) algorithm is adopted to simulate the modulation of light occurring in scratches of different depths and different widthdepth ratios. Finally, the paper carried out R-on-1 laserinduced damage threshold test on typical scratches. Experimental results show that plastic scratches with the depth of 53 nm have little effect on the laser damage, and the scratches in plasticbrittle transition section induce damage with a certain probability. The damage threshold of brittle scratch is far below the threshold of substrate, which is 431% of the substrate’s. Thus, brittle scratch is an important factor to reduce the laserinduced damage threshold of fused silica optics. The results indicate that the experimental data and the theoretical simulation show a good consistency.

参考文献/References

备注/Memo

备注/Memo:
收稿日期: 2016-08-30. 作者简介: 钟曜宇(1992— ),男,硕士研究生. 通讯作者: 戴一帆,教授,dyf@nudt.edu.cn.
更新日期/Last Update: 2017-02-28