|本期目录/Table of Contents|

 Circuit Design of an Implantable MEMS Pressure Sensor System(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年1期
页码:
90
栏目:
微机电系统
出版日期:
2013-01-15

文章信息/Info

Title:
 基于MEMS技术可植入微压力传感器的检测电路设计
作者:
 Peng Guangbin12 Liu Jingquan12 Wang Longfei12 Chai Xin12
 1. Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China;
2. National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240,China
Author(s):
 彭广彬12 刘景全12 王龙飞12 柴欣12
 1. 上海交通大学微纳科学技术研究院,上海200240;
2. 上海交通大学微米/纳米加工技术国家级重点实验室,上海200240
关键词:
 implantable pressure sensor MEMS testing circuit for micro capacitor parylene
Keywords:
 植入式压力传感器MEMS微电容测试电路聚对二甲苯
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 To monitor the pressure in vivo, an implantable, wireless blood and intracranial pressure
sensor is presented based on micro electro mechanical system (MEMS) technology and a solution to
reading signal. Since this pressure sensor is a capacitive pressure sensor, the capacitance signal of the
sensor is converted into a voltage signal through the integrated circuit CAV414. According to theoretical
calculations, the value of pressure sensor capacitance is about 15 pF. The IC is optimized for capacities
within the wide range from 10 pF to 2 nF with possible changes from 5% to 100% of reference
capacity. Therefore, the minimum value of detectable capacitance change is 0.75 pF. The output
voltage range of 0—5 V can be used as the input signal source for the integrated analog-to-digital
converter(ADC). The chip ADC0809 is selected as the ADC. The ADC0809 is a monolithic CMOS
device with an 8-channel multiplexer and an 8-bit analog -to-digital (A/D) converter . The 8-bit
parallel digital output signal from the ADC0809 can be directly applied to subsequent digital signal
processing, which is implemented based on the field programmable gate array(FPGA).
Abstract:
 为实现体内压力(如:血压、颅内压等)的实时监测,采用微机电系统(MEMS)技术制造出植入式微压力传感
器.由于它是电容式传感器,在信号读取系统中,首先通过集成电路CAV414将电容信号转换为电压信号. 通过理论计
算和实际试验测试, 微压力传感器初始电容值为15 pF. CAV414检测范围是10 pF~2 nF, 检测精度为电容初始值的
5%,因此在该系统中可检测到的电容最小变化量为0.75 pF,其输出电压范围为0~5 V,该电压信号可以直接作为模
拟/数字转换器(ADC)的输入信号. 选用ADC0809实现模拟信号向数字信号的转换. ADC0809为一款8通道8位模数转
换器,通过FPGA实现对ADC0809的驱动控制. ADC0809的8位输出信号直接作为数字信号的输入,在本文试验中数字
信号处理通过FPGA编程实现.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-02-22