|本期目录/Table of Contents|

Closed-Loop Control System of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2012年4期
页码:
322-326
栏目:
微机电系统
出版日期:
2012-07-15

文章信息/Info

Title:
 基于电磁激励的SOI鄄MEMS谐振式加速度计的闭环检测系统
作者:
 WANG Junbo1 SHANG Yanlong12 CHEN Deyong1 SHI Qiang12 LI Guangbei12
 (1. State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;
2. Graduate University of Chinese Academy of Sciences, Beijing 100190, China)
Author(s):
 王军波1 商艳龙12 陈德勇1 史强12 李光北12
 (1. 中国科学院电子学研究所传感技术国家重点实验室, 北京100190;
2. 中国科学院研究生院, 北京100190)
关键词:
 closed-loop control SOI-MEMS resonant accelerometer electromagnetic excitation
Keywords:
闭环控制SOI-MEMS谐振式加速度计电磁激励
分类号:
-
DOI:
-
文献标识码:
A
摘要:
A closed - loop control system with electromagnetic excitation designed for a SOI - MEMS resonant accelerometer is proposed in this paper. The sensor chip is developed by silicon - direct - bonding SOI wafer 10 μ m+2 μ m+290 μ m with MEMS fabrication technology. z-axis acceleration is differentially detected by using two H-style vibrating beams through a frequency shift caused by the inertial force acting as bending stress loading. Frequency change of vibrating beams is used to calibrate acceleration. Electromagnetic excitation and detection are adopted to make the closed-loop control of the sensor easier. The whole closed-loop control system for the accelerometer mainly consists of amplifier automatic gain control AGC circuit buffer and phase shifter. Testing results show that the accelerometer with the closed-loop system can work stably at 58.958 kHz when 1g z-axis acceleration is applied which is consistent with the open-loop testing result. Final tests show that the Q-factor of vibrating beam is about 400 in air and the differential sensitivity measured can reach as high as 584 Hz/g.
Abstract:
 介绍了一种基于电磁激励方式,采用基于绝缘体上硅的微电子机械系统(SOI鄄MEMS)加工方法制作谐振式加速度计及其闭环控制电路系统.传感器芯片制作采用的是SOI材料(10 μm+2 μm+290 μm),利用MEMS加工工艺制作.当外界z轴方向加速度作用于加速度计时,加速度计的两根“H”型谐振梁因受到弯曲应力而产生谐振频率的漂移,通过检测谐振梁频率的变化标定加速度的大小.电磁激励检测方式有利于加速度计的最终闭环控制.闭环电路控制系统主要由增益放大部分、自动增益控制(AGC)电路缓冲系统和移相器组成.测试结果显示,当有1g重力加速度作用于加速度计,闭环电路可稳定输出检测正弦频率信号58.958 kHz,与开环扫频结果一致.加速度计的“H”型谐振梁空气中检测Q值约为400,灵敏度可达584 Hz/g.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2012-11-14