|本期目录/Table of Contents|

原子力显微镜纳米沉积加工温度仿真(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2017年4期
页码:
267-272
栏目:
纳米技术
出版日期:
2017-07-15

文章信息/Info

Title:
Simulation of Temperature During Nano-Deposition Fabrication with Atomic Force Microscope
作者:
刘增磊1 高爱莲1 袁帅2 焦念东3
1.南阳理工学院电子与电气工程学院,南阳 473004;2. 沈阳建筑大学信息与控制工程学院,沈阳 110168;3. 中国科学院沈阳自动化研究所,沈阳 110016
Author(s):
Liu Zenglei1 Gao Ailian1 Yuan Shuai2 Jiao Niandong3
1. School of Electronics and Electrical Engineering, Nanyang Institute of Technology, Nanyang 473004, China; 2. Information and Control Engineering Faculty, Shenyang Jianzhu University, Shenyang 110168, China; 3. Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110168, China
关键词:
原子力显微镜 纳米焊接 纳米加工 温度仿真
Keywords:
atomic force microscope nano-welding nano-fabrication temperature simulation
分类号:
TP242.3
DOI:
10.13494/j.npe. 20170009
文献标识码:
A
摘要:
原子力显微镜(atomic force microscope,AFM)纳米沉积加工是一种重要的纳米焊接手段, 其加工机理存在场致蒸发和热致蒸发两种可能.为明确AFM沉积加工的机理,本文通过仿真研究了AFM纳米沉积加工过程中的温度变化,分析了加工电流的波形和空气介质对沉积的影响,并在此基础上建模,分别研究瞬态电流和稳态电流引起的温度变化.通过仿真发现,沉积中温度确有上升,但远没有达到引起热蒸发的程度.验证了AFM纳米沉积加工是基于场蒸发的原理.
Abstract:
Nano-deposition fabrication with atomic force microscope(AFM) is an important technique for nano-welding. The AFM nano-deposition might be induced by either electric field or heat. To reveal the mechanism, this paper researchs the temperature variation during AFM nano-deposition .The effects of fabrication current waveform and air on deposition were analyzed, and a model was built on this basis to study the temperature variation caused by transient current and steady-state current respectively. It was found that temperature did rise in the process of deposition, but there was a long way before the temperature reached the value for heat-induced deposition. Therefore, it was testified that AFM nano-deposition fabrication was based on electric-field-induced deposition theory.

参考文献/References

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备注/Memo

备注/Memo:
收稿日期: 2017-02-16. 基金项目: 国家自然科学基金资助项目(61504072,61305125). 作者简介: 刘增磊(1982—),男,博士,讲师. 通讯作者: 刘增磊,liuzenglei@nyist.edu.cn.
更新日期/Last Update: 2017-12-20