|本期目录/Table of Contents|

铝合金反射镜磁流变抛光表面质量控制的参数优化(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2017年2期
页码:
151-157
栏目:
精密加工
出版日期:
2017-03-15

文章信息/Info

Title:
Parameters Optimization of Surface Quality Control on Magnetorheological Finishing for Aluminum Alloy Mirror
文章编号:
1672-6030(2017)02-0151-07
作者:
葛坤鹏12 李圣怡12 胡皓12
1. 国防科学技术大学机电工程与自动化学院, 长沙410073; 2. 超精密加工技术湖南省重点实验室, 长沙410073
Author(s):
Ge Kunpeng12 Li Shengyi12 Hu Hao12
1. College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China; 2. Hunan Key Laboratory of UltraPrecision Machining Technology, Changsha 410073, China
关键词:
铝合金反射镜 化学机械抛光技术 磁流变抛光 去除函数 表面质量
Keywords:
aluminum alloy mirror chemical mechanical polishing magnetorheological finishing removal function surface quality
分类号:
TH161
DOI:
10.13494/j.npe.20160030
文献标识码:
A
摘要:
基于化学机械抛光(CMP)技术的基本原理,选取合适的抛光液,研究了铝合金反射镜磁流变抛光过程中材料的去除机理,分析了磁流变平坦化加工的可行性,并通过单因素实验确定了最优参数,最后研究了相应去除函数的稳定性.实验结果表明,铝镜经磁流变抛光后获得了较高的表面质量,表面粗糙度达到Ra =5.593 nm,且去除了车削时产生的纹路;铝镜磁流变去除函数稳定,去除效率较高.
Abstract:
Based on the principles of chemical mechanical polishing (CMP), suitable polishing liquid was selected to study the removal mechanism in magnetorheological finishing (MRF) polishing process of aluminum alloy mirror. The feasibility of applying planarization technology in MRF was analyzed, the optimal parameters were determined through a series of single factor experiments, and the stability of the corresponding removal function was also analyzed. Results show that the aluminum alloy mirror can obtain a better surface quality through MRF polishing, with a surface roughness of Ra= 5.593 nm, and the turning grains removed. MRF for polishing aluminum mirror enjoys stable removal function and good removal efficiency.

参考文献/References

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备注/Memo

备注/Memo:
收稿日期: 2016-05-22. 基金项目: 国家自然科学基金资助项目(51405503). 作者简介: 葛坤鹏(1993—),男,硕士研究生. 通讯作者: 李圣怡,教授,syli@nudt.edu.cn.
更新日期/Last Update: 2017-12-20