|本期目录/Table of Contents|

一种适用于原位纳米力学测试的AFM测头(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2017年2期
页码:
93-99
栏目:
纳米技术
出版日期:
2017-03-15

文章信息/Info

Title:
A New AFM Head Designed for Insitu NanoMechanics Measurement
文章编号:
1672-6030(2017)02-0093-07
作者:
李艳宁 曾荟燕 吴森 刘璐 胡晓东
精密测试技术及仪器国家重点实验室(天津大学), 天津300072
Author(s):
Li Yanning Zeng Huiyan Wu Sen Liu Lu Hu Xiaodong
State Key Laboratory of Precision Measuring Technology and Instruments (Tianjin University), Tianjin 300072, China
关键词:
纳米力学 原子力显微镜 压电扫描器 光杠杆 电容传感器
Keywords:
nano-mechanics atomic force microscopy piezo scanner optical lever capacitance sensor
分类号:
TH823
DOI:
10.13494/j.npe.20150002
文献标识码:
A
摘要:
设计并制作了一种适用于原位纳米力学测试的原子力显微镜(AFM)测头.测头由光学检测系统和Z向压电陶瓷微位移机构组成.其中光学检测系统采用光杠杆与显微镜同轴光路检测探针形变,压电位移机构内置电容传感器可实现探针进给量的闭环控制.标定实验表明该测头闭环位移分辨力优于10 nm,在标定范围内具有很好的线性.利用该测头对某型微悬臂梁法向弹性常数进行了测量,测得值与采用具有溯源性的标定方法所得结果一致.
Abstract:
A new atomic force microscopy (AFM) head is developed for the in-situ nano-mechanics measurement. The AFM head is composed of an optical detection system and a piezo scanner in Z-axis. The optical detection system consists of a microscope and a coaxial optical lever, which can detect the deflection of the AFM cantilever probe. The piezo scanner is integrated with a ring-shaped capacitance sensor which can realize closed-loop control of the displacement in Z-axis. Calibration indicates that the closed-loop resolution of the Z-scanner is better than 10 nm, and the displacement is with good linearity in the whole range. The AFM head is utilized to measure the normal spring constant of a micro cantilever. The measurement result is in agreement with the value obtained by a traceable calibration method.

参考文献/References

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备注/Memo

备注/Memo:
收稿日期: 2016-10-04. 基金项目: 国家自然科学基金青年基金资助项目(61204117);国家高技术研究发展计划(863计划)资助项目(2012AA041204). 作者简介: 李艳宁(1968—),男,博士,教授. 通讯作者: 吴森,博士,讲师,senwu@tju.edu.cn.
更新日期/Last Update: 2017-12-20