|本期目录/Table of Contents|

 BiFeO3纳米纤维压电式压力传感器的制备工艺研究(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2016年5期
页码:
373-378
栏目:
纳米技术
出版日期:
2016-09-15

文章信息/Info

Title:
 Process Research on Preparation of BiFeO3 Nanofiber
Piezoelectric Pressure Sensor
作者:
 盛伟光 谭晓兰 张久超
 北方工业大学机械与材料工程学院,北京100144
Author(s):
 Sheng Weiguang Tan Xiaolan Zhang Jiuchao
 College of Mechanical and Materials Engineering, North China University of Technology, Beijing 100144, China
关键词:
 压力传感器 MEMS工艺 BiFeO3 纳米纤维
Keywords:
 pressure sensor MEMS process BiFeO3 nanofiber
分类号:
TH12
DOI:
10.13494/j.npe.20160003
文献标识码:
A
摘要:
 以铁酸铋(BiFeO3,BFO)作为压力敏感材料,利用其压电特性,将通过静电纺丝法制备的纳米纤维与光刻、溅射、干法刻蚀等MEMS加工工艺制备的硅基底片相结合,设计工艺流程并制备了BFO纳米纤维压电式压力传感器,得到质量较高的传感器样片.分析工艺流程,得到工艺顺序为先刻蚀硅腔260 μm,接着制备电极,再刻蚀硅腔90 μm,最后纺丝纳米纤维;在一定条件下纤维取向最优的实验参数是推进速度、电压、接收距离和极板间距分别为0.3 mL/h、19 kV、14 cm和10 cm,为铁电材料在微器件上的应用提供了参考.
Abstract:
 Considering its piezoelectric properties, BiFeO3 (BFO) was adopted as the pressure sensitive material to fabricate BFO nanofiber MEMS pressure sensor. The nanofibers were prepared through electrostatic spinning, and the silicon slice was prepared using such micromachining technology as photolithography, sputtering and dry etching. The nanofibers and silicon slice were combined with different processes, and the BFO nanofiber piezoelectric pressure sensor with a high quality was obtained. Experimental and analysis results show that the best processes is: firstly etching silicon cavity of 260 μm, then preparing electrode and reetching silicon cavity of 90 μm, and finally spinning nanofibers. Under a certain condition, the optimal experimental parameters of fiber polarization sequence are advancing velocity of 0.3 mL/h, voltage of 19 kV, receiving distance of 14 cm and plate spacing of 10 cm. This paper provides reference for the application of multifunctional materials in micro devices.

参考文献/References

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备注/Memo

备注/Memo:
收稿日期: 2016-03-28.
基金项目: 国家自然科学基金资助项目(51375017).
作者简介: 盛伟光(1990—),男,硕士研究生.
通讯作者: 谭晓兰,副教授,tanxiaolan2004@126.com.
更新日期/Last Update: 2016-09-19