|本期目录/Table of Contents|

具有指定统计参数的粗糙表面的加工和复制(英文)(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2015年2期
页码:
90-101
栏目:
精密加工
出版日期:
2015-03-15

文章信息/Info

Title:
Fabrication and Reproduction of Rough Surfaces with Specified Statistical Parameters
作者:
李青 马成福 陈宇航
中国科学技术大学工程科学学院,合肥230026
Author(s):
Li Qing Ma Chengfu Chen Yuhang
School of Engineering Science, University of Science and Technology of China, Hefei 230026, China
关键词:
粗糙表面聚焦离子束(FIB)加工聚二甲基硅氧烷(PDMS)转印原子力显微镜(AFM)
Keywords:
rough surface focused ion beam (FIB) fabrication polydimethylsiloxane (PDMS) transfer atomic force microscopy (AFM)
分类号:
TN16
DOI:
10.13494/j.npe.20140080
文献标识码:
A
摘要:
表面微/纳米结构和各种功能特性密切相关,为了更加定量地分析结构参数和功能特性的内在相互依赖关系,需要首先获得具有指定统计粗糙度参数(例如表面均方根粗糙度、偏斜度、峰度、自相关长度等)的三维粗糙表面.本文主要进行可控表面统计参数的粗糙结构的设计、加工和复制研究.为了提高设计精度,特别是对于具有大自相关长度的表面,在非线性共轭梯度法中引入了遗传算法(GA).经优化设计后,利用聚焦离子束(FIB)在硅基底上加工了一系列具有不同高度分布和自相关长度的三维粗糙表面.最后,用转印的方法将这些结构复制到聚二甲基硅氧烷(PDMS)薄膜,并且应用参数评价和频谱分析等对模板和复制结构之间的原子力显微镜(AFM)测量结果评价比较.可控表面统计参数的粗糙表面加工及复制可为后续进行粗糙结构相关的表面功能特性定量分析研究提供支持.
Abstract:
Surface micro-/nano-structures are of critical importance owing to their direct relevance to a wide range of functional performances. For the in-depth understanding of the intrinsic interdependence more quantitatively, three-dimensional (3D) rough surface structures with precisely assigned statistical roughness parameters including root-mean-square (RMS) roughness, skewness, kurtosis and autocorrelation length, etc. are highly demanded. Such rough surfaces were designed, fabricated and reproduced in this paper. To improve design accuracy, especially for surfaces with large autocorrelation lengths, genetic algorithm (GA) was introduced into the non-linear conjugate gradient method. After the optimization, a set of 3D rough structures with different height distributions and autocorrelation lengths were fabricated by focused ion beam (FIB) milling on silicon substrates. Finally, the structures were reproduced onto polydimethylsiloxane (PDMS) using polymer casting method. From aspects of visual image comparison, surface parameters evaluation and spectral analysis, the agreement between the templates and the replicas was evaluated based on atomic force microscopy (AFM) measurements. The fabrication and reproduction of the artifacts can support further quantitative investigations of the roughness-relevant functional performances.

参考文献/References

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备注/Memo

备注/Memo:
收稿日期: 2014-12-29.
基金项目: 国家重点基础研究发展计划(973计划)资助项目(2011CB932801);国家自然科学基金资助项目(51275503).
作者简介: 李青(1990—), 女,硕士生.
通讯作者: 陈宇航,副教授, chenyh@ustc.edu.cn.
更新日期/Last Update: 2015-03-25