|本期目录/Table of Contents|

 Mg-Al共掺杂ZnO薄膜的制备及其光学特性(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年2期
页码:
105-111
栏目:
纳米技术
出版日期:
2013-03-15

文章信息/Info

Title:
 Preparation of Mg-Al Co-Doped ZnO Thin Films and
Its Optical Properties
作者:
 房东玉12 李朝玲12 李轩2 戚雯1 姚琲12
 1. 天津大学材料科学与工程学院, 天津300072; 2. 天津大学分析测试中心,天津300072
Author(s):
 Fang Dongyu12 Li Chaoling12 Li Xuan2 Qi Wen1 Yao Pei12
 1.School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China;
2. Center for Analysis and Tests, Tianjin University, Tianjin 300072, China
关键词:
 ZnO薄膜Mg-Al共掺杂溶胶鄄凝胶法光致发光谱缺陷能级
Keywords:
 ZnO thin filmMg-Al co-dopingsol-gel methodphotoluminescence spectradefect level
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 采用溶胶-凝胶(sol-gel)旋涂法在载玻片上制备了不同Al掺杂量的Mg-Al共掺杂ZnO薄膜. 在室温下利用X射
线衍射仪(XRD)、扫描电子显微镜(SEM)和光致发光(PL)谱仪等手段分析了Mg-Al共掺杂ZnO薄膜的微结构、形貌和
发光特性. XRD结果表明Mg-Al共掺杂ZnO薄膜具有六角纤锌矿结构;随着Al掺杂量的增加,共掺杂薄膜呈c轴取向生
长. 由SEM照片可知薄膜表面形貌随Al掺杂量的增加由颗粒状结构向纳米棒状结构转变. 透射光谱表明共掺杂薄膜
在可见光区内的透射率大于50%,紫外吸收边发生蓝移. 在室温下的PL谱表明Mg-Al共掺杂ZnO薄膜的紫外发射峰向
短波长方向移动;Al掺杂摩尔分数为1%和3%的Mg-Al共掺杂ZnO薄膜的可见发射峰分别为596 nm的黄光和565 nm
的绿光,黄光主要与氧间隙有关,而绿光主要与氧空位有关.
Abstract:
 Mg-Al co-doped ZnO thin films with different Al doping contents were deposited onto glass
substrates by sol-gel spin coating method. The microstructural, surface morphological and optical prop-
erties of the Mg-Al co-doped ZnO thin films were characterized by X-ray diffractometer (XRD), scan-
ning electron microscope (SEM) and photoluminescence (PL) spectrometer at room temperature, re-
spectively. The XRD results show that Mg-Al co-doped ZnO thin films possess a hexagonal wurtzite
structure, and the co-doped thin films have c-axis preferred orientation growth with the increase of Al
doping contents. According to the SEM images, surface morphologies of the thin films change from
grain structure to nanorod shape as Al doping contents increase. The transmission spectra show that co-
doped thin films have an average optical transparency of over 50% within the visible range and that
blue shift occurs to the UV absorption edge. The PL spectra at room temperature show that the ultravio-
let emission peak of Mg-Al co-doped ZnO thin films shifts towards the shorter wavelength; the visible
emission peaks of Mg-Al co-doped ZnO thin films with Al doping molar fraction of 1% and 3% are yel-
low emission centered at 596 nm and green emission located at 565 nm, respectively. The yellow lumi-
nescence is mainly associated with oxygen interstitials, and the green luminescence is mainly related to
oxygen vacancies.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-03-25