|本期目录/Table of Contents|

 A Method for Correcting Edge Effect in Deterministic Optical Manufacturing(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年1期
页码:
57
栏目:
精密加工
出版日期:
2013-01-15

文章信息/Info

Title:
 确定性光学加工中抑制边缘效应的一种方法
作者:
 Mou Zhichao1 Zheng Ziwen2 Shu Yong2 Wang Guilin2 Nie Xuqing2
 1. State Key Laboratory for Aerodynamics, China Aerodynamics Research and Development Center, Mianyang
621000, China; 2. College of Mechatronics Engineering and Automation, National University of Defense
Technology, Changsha 410073, China
Author(s):
 牟志超1 郑子文2 舒勇2 王贵林2 聂徐庆2
 1. 中国空气动力研究与发展中心空气动力学国家重点实验室,绵阳621000;
2. 国防科学技术大学机电工程与自动化学院,长沙410073
关键词:
 deterministic polishing edge effect spherical polishing tool pseudo ρ-θ
Keywords:
 确定性抛光 边缘效应 球形抛光工具 伪ρ-θ
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 In the process of deterministic optical manufacturing, the edge effect will arise because of
the change of machining conditions when polishing tool locates in edge area, which will lower the sur
face accuracy of workpiece and debase machining efficiency. Aiming at the situation, a spherical po-
lishing technology is presented for the control of edge effect. The removal function of spherical tool has
fine stability and small diameter, with a shape similar to Gaussian distribution, which is greatly suit-
able for correcting local errors and removing the edge effect of optical elements. The polishing route of
the spherical polishing tool is planned by using pseudo ρ-θ raster scanning method. The route can sim-
plify the moving structure of the spherical polishing tool, homogenize machining texture and improve ma
chining quality correspondingly. Finally, the figuring ability of the spherical polishing technology is
validated by a correcting experiment on edge error. In the experiment, a crystallitic spherical mirror
was polished by using the spherical tool, a severe edge effect was eliminated effectively, the peak-to-
valley value (PV) of residual errors was reduced from 1.607λ to 0.365λ, and the mean-square-root value
(RMS) was reduced from 0.195λ to 0.024λ(λ=632.8 nm).
Abstract:
 在确定性光学抛光过程中,当加工到工件边缘时由于工艺条件发生变化会产生边缘效应,导致加工效率降
低和面形误差增大. 针对这种情况,提出了一种可修正边缘现象的球形工具抛光技术,其去除函数稳定性较好,形状
趋于高斯分布且束径也较小,对修正边缘现象以及局部面形误差具有较好的效果. 同时规划了其抛光路径,采用一
种伪ρ鄄θ光栅扫描运动方式的加工路径,简化了球形抛光工具的结构,并且由于使加工纹路有了变化,可使加工后的
表面纹理呈现无序性和均匀性特征,相应可提高加工后工件的表面质量. 最后通过对一块微晶球面镜的加工(面形
误差峰谷值PV由加工前1.607λ(λ=632.8 nm)收敛到加工后0.365λ,均方根值RMS由0.195λ收敛到0.024λ),验证了球
形抛光工具具有修正边缘翘边现象的能力.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-02-22