|本期目录/Table of Contents|

 高精度球面检测中调整误差的精确校正(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年1期
页码:
20
栏目:
精密测量
出版日期:
2013-01-15

文章信息/Info

Title:
 Accurate Calibration of Misalignment in High-Precision Spherical Surface Testing
作者:
 王道档1 杨甬英2 陈晓钰2 邵卫红2 卓永模2
 1. 中国计量学院计量测试工程学院, 杭州310018;
2. 浙江大学现代光学仪器国家重点实验室, 杭州310027
Author(s):
 Wang Daodang1 Yang Yongying2 Chen Xiaoyu2 Shao Weihong2 Zhuo Yongmo2
 1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China;
2. State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
关键词:
 调整误差校正Zernike系数球面检测波前离焦波前倾斜
Keywords:
misalignment calibration Zernike coefficients spherical surface testing wavefront defocus wavefront tilt
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 针对高精度球面检测中球面的调整误差影响,分别研究了波前离焦和倾斜所引入的Zernike像差项,并以此
为基础,提出了基于Zernike系数的高精度球面调整误差校正方法. 利用Zygo干涉仪对大数值孔径的待测球面进行了
检测,实验中对待测球面同时引入波前离焦和倾斜误差,再分别运用所提出的校正方法和传统的消倾斜离焦校正方
法得到波面数据并进行对比,进而验证了所提出的校正方法的可行性. 实验结果表明,利用该方法可有效地校正大
数值孔径球面存在调整误差时所引入的球面像差,并且实验中的校正精度达到了0.002λ(λ为检测光波长). 提出的
基于Zernike系数的球面调整误差校正方法可降低对于调节机构的精度以及检测人员的经验要求, 在高精度球面检
测中具有非常高的实际应用价值.
Abstract:
 Based on the detailed analysis of the Zernike aberrations of wavefront errors, including the
wavefront defocus and tilt, introduced by test surface misalignment in the high-precision spherical sur-
face testing, a method for the misalignment calibration using Zernike coefficients was put forward in
this paper. The experimental validation of the proposed calibration method was carried out with Zygo
interferometer, in which a high-numerical-aperture spherical surface was tested by introducing both the
wavefront defocus and tilt. The measured data were then respectively processed with the proposed
method and the traditional calibration method for removing the tilt and defocus errors, by which the
feasibility of the proposed method was demonstrated. This method is effective for calibrating the spheri-
cal aberration introduced by misalignment of high-numerical-aperture spherical surfaces, and an accu-
racy of 0.002λ (λ is the optical wavelength in the test) was achieved in the experiment. The proposed
method can help lower the requirement of the adjusting precision of mechanical devices as well as the
skill of testing personnel, which can be applied to the high-precision measurement of spherical surface.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-02-22