|本期目录/Table of Contents|

 多次压电效应对压电石英物性系数的影响(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年1期
页码:
45
栏目:
精密测量
出版日期:
2013-01-15

文章信息/Info

Title:
 Influence of Multiple Piezoelectric Effects on Physical Parameters of Piezoelectric Quartz
作者:
 张忠华 王淑云 程光明 阚君武 王鸿云
 浙江师范大学精密机械研究所, 金华321004
Author(s):
 Zhang Zhonghua Wang Shuyun Cheng Guangming Kan Junwu Wang Hongyun
 Institute of Precision Machinery, Zhejiang Normal University, Jinhua 321004, China
关键词:
 压电多次压电效应石英晶体压电系数机电耦合系数
Keywords:
 piezoelectricity multiple piezoelectric effects quartz crystal piezoelectric coefficient
electromechanical coupling factor
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 为改善石英器件与产品的性能以适应并推动微/纳机电系统技术的发展,从理论和实验两方面系统地研究了
多次压电效应对压电石英弹性系数、压电系数和机电耦合系数等物性系数的影响.理论分析表明,外应力作用下多次
压电效应对压电石英弹性系数及压电系数的影响分别是多次逆和多次正压电效应综合作用的体现.采用与压电石英
晶体并联一个远大于其等效电容量的电容器的实验方法,测试了多次压电效应对石英物性系数的影响,获得了三次
压电效应时石英的压电系数为0.04 pC/N,比未考虑多次压电效应时提高了1.75%,所对应的机电耦合系数亦增加了
1.75%.
Abstract:
 To improve the performance of quartz devices and products to adapt to and to promote the
development of micro/nano electromechanical systems, the influence of multiple piezoelectric effects on
elastic coefficient, piezoelectric coefficient and electromechanical coupling factor of piezoelectric quartz
crystals was theoretically and experimentally studied. The theoretical analysis shows that the influence
of multiple piezoelectric effects on elastic coefficient and piezoelectric coefficient is caused by multiple
direct piezoelectric effects and multiple converse piezoelectric effects, respectively. The influence of
multiple effects on physical parameters of piezoelectric quartz crystal was tested by connecting piezo-
electric quartz in parallel with a capacitor whose capacity is much greater than that of the quartz. Ter-
tiary piezoelectric coefficient of piezoelectric quartz is obtained through the experiment, which is 0.04
pC/N. The experimental results indicate that multiple effects cause both piezoelectric coefficient and
electromechanical coupling factor to increase by 1.75%.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-02-22