|本期目录/Table of Contents|

 Fabrication and Measurement of Traveling Wave Piezoelectric Micropump(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年1期
页码:
79
栏目:
微机电系统
出版日期:
2013-01-15

文章信息/Info

Title:
 行波压电微泵的制作和测试
作者:
 Zhang Wei Wang Cheng Yue Zhao Zhan Chuanna Geng Weidong Niu WenchengLiu Guohua
 College of Information Technical Science, Nankai University, Tianjin 300071, China
Author(s):
 张维 王程 岳钊 战传娜 耿卫东 牛文成 刘国华
 南开大学信息技术科学学院,天津300071
关键词:
 piezoelectric micropump traveling wave saw-tooth microchannel
Keywords:
 压电微泵行波锯齿形微管道
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 The micropump is an important factor in the development of the microfluidic chip. A novel
piezoelectric micropump driven by traveling wave was presented to improve its performance. Firstly, the
micropumps were designed with different microchannels (saw-tooth and straight microchannels), and
the model simulation of the vibration of bimorphs and the deformation of microchannels were conducted
and optimized. Then the micropumps with different microchannels were fabricated by thermal bonding
technology. The performance of micropumps was tested at different frequencies of driving signal. Mean-
while, the relationship between the flow rate and the back pressure was measured and the voltage am-
plitude property was also tested. From the simulation and experimental results, it can be concluded that
the micropump with saw-tooth microchannel exhibits higher maximum average flow rate (33.36 μL/min)
and back pressure (1.13 kPa) than those with straight microchannel when driving voltage amplitude is
fixed at 26 V.
Abstract:
 微泵是微流体芯片发展水平的重要标志. 为提高微泵的工作性能,提出了一种新型行波驱动的压电微泵. 在
设计了不同的微管道结构(锯齿形微管道和直微管道)的基础上,对压电执行器和微管道进行仿真分析和优化设计.
采用热键合工艺制作具有不同微管道的微泵,在不同频率的驱动信号下测定行波微泵的频率特性,同时也测量了微
泵流速与背压的关系曲线以及电压幅值特性. 相比于直管道微泵,锯齿形管道微泵具有更好的工作性能,在26 V驱
动电压下,其最大平均流速和背压分别达到33.36 μL/min和1.13 kPa.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-02-22