|本期目录/Table of Contents|

 MOEMS扫描微镜的测试实验与分析(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2012年4期
页码:
307-312
栏目:
微机电系统
出版日期:
2012-07-15

文章信息/Info

Title:
 Testing and Analysis of the MOEMS Scanning Mirror
作者:
 罗彪123 温志渝123 陈李123 钱蓉蓉123 梁玉前123
 (1. 重庆大学新型微纳器件与系统技术国家重点学科实验室, 重庆400030;
2. 重庆大学光电技术及系统教育部重点实验室, 重庆摇400030;
3. 重庆大学微系统研究中心, 重庆摇400030)
Author(s):
 LUO Biao 123 WEN Zhiyu123 CHEN Li123 QIAN Rong鄄rong123 LIANG Yuqian123
 (1. Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China;
2. Key Laboratory of Opto-Electronic Technology and System, Ministry of Education, Chongqing University,Chongqing 400030, China;
3. Microsystem Research Center of Chongqing University, Chongqing 400030, China)
关键词:
 MOEMS 微镜 角度传感器 误差分析 测试
Keywords:
 MOEMS micro-mirror angle sensor error analysis testing
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 针对集成角度传感器微镜在实际使用过程中的要求,在分析研究MOEMS扫描微镜结构与工作原理的基础上,进行了MOEMS扫描微镜最大偏转角度、驱动电压、谐振频率和传感器输出参数的测试.并且为了提高数据的可靠性,利用几何光学理论和误差理论的方法对该测试系统进行了详细分析,以此作为测试的系统误差与测试随机误差进行了误差合成.误差分析表明,该微镜在驱动电压为0.7 V时,最大偏转角为±8.704 15°,测试误差为±0.045 605°.此外,还对测试过程中扫描微镜谐响应频率随扫描模式及扫描电压而变化的现象进行了分析.
Abstract:
To meet the practical requirements in using the MOEMS scanning mirror with angle sensor,the maximal angle,drive voltage,resonance frequency and sensor’s output signal of the MOEMS scanning mirror are tested based on its structure and working principle. To improve the reliability of the calibration results,the geometrical optics theory and the error theory are adopted in this paper to analyze the test system in detail,based on which the system testing error and the randomized testing error are synthesized. The result shows that when the mirror is driven at 0.7 V,the maximum scanning angle is ±8.704 15° and the error is ±0.045 605°. The phenomenon that vibration frequency changes with scanning mode is observed and analyzed,which will provide some reference when the scanning mirror is controlled by close divider circuit. Meanwhile,output signal is analyzed,and the result shows that the output signal of sensor can be used for supervising the angle of the scanning mirror even though the output signal consists of two parts.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2012-11-14