|本期目录/Table of Contents|

 A Smart Wide Range Resonance Gas Sensor with a Multi-Mode Single-Port Micro-Cantilever(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2013年2期
页码:
164-168
栏目:
微机电系统
出版日期:
2013-03-15

文章信息/Info

Title:
 基于单端口多模态微悬臂梁的谐振式大量程智能气体传感器
作者:
 Zhao Jiahao1 Li Peng1 Guan Liu1 Li Xiangyu2 You Zheng1
 1. State Key Laboratory of Precision Measurement Technology and Instruments(Tsinghua University), Beijing 100084,
China; 2. Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
Author(s):
 赵嘉昊1 李鹏1 管镠1 李翔宇2 尤政1
 1.摇精密测试技术及仪器国家重点实验室(清华大学),北京100084; 2. 清华大学电子工程系,北京100084
关键词:
 gas sensorsingle-portcantilevermulti-modewide range
Keywords:
 气体传感器单端口悬臂梁多模态大量程
分类号:
-
DOI:
-
文献标识码:
A
摘要:
 A cantilever based resonance gas sensor monitors the resonant frequency shift of the can-
tilever in order to detect certain gas molecules. This paper presents a smart resonance gas sensor, in
which a multi-mode single-port micro-cantilever is driven by a self-actuating and detecting (SAD) cir-
cuit loop. The motivation of the SAD loop simplifies the structure and micro-machining process of the
cantilever. Furthermore, it has a smart function to make the resonating cantilever transfer its resonance
mode conveniently for a wide detection range. The model and the sensitivity distribution of the micro-
cantilever device in different resonance modes are analyzed. The gas response features of the proposed
gas sensor, in which the single-port cantilever operated in multi-mode, are also investigated to demonstrate
the design of the multi-mode SAD system and smart function of mode switch for wide detection range.
Abstract:
 基于悬臂梁的谐振气体传感器可以通过测量悬臂梁谐振频率的偏移而检测相应气体分子. 本文介绍了一种
使用自激励自检测(SAD)电路驱动单端口多模态微悬臂梁的智能谐振式气体传感器. 这种激励模式简化了悬臂梁
结构和微加工过程. 另外, 还可以通过便捷地改变悬臂梁谐振模态实现大量程的气体浓度检测. 通过仿真分析了不
同模态下悬臂梁的模型和敏感度. 通过测量这种基于单端口多模态悬臂梁的气体传感器对于气体的响应情况,展示
了这种多模态SAD系统以及其改变模态增加测量量程的功能.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2013-03-25