|本期目录/Table of Contents|

 Novel Electrostatic Bidirectional-Translation MEMS Deformable Mirror(PDF)

《纳米技术与精密工程》[ISSN:1672-6030/CN:12-1351/O3]

期数:
2012年4期
页码:
313-317
栏目:
微机电系统
出版日期:
2012-07-15

文章信息/Info

Title:
  新型静电驱动双向平动MEMS变形镜
作者:
 YAO Jun1 TAO Feng-gang12 REN Hao12 WANG Wei-min12 ZHUANG Xu-ye1
 (1. State Key Laboratory of Optical Technologies for Microfabrication,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;
2. Graduate University of Chinese Academy of Sciences,Beijing 100039, China)
Author(s):
 姚军1 陶逢刚12 任豪12 汪为民12 庄须叶1
 (1. 中国科学院光电技术研究所微细加工光学技术国家重点实验室, 成都 610209;
2. 中国科学院研究生院, 北京 100039)
关键词:
 bidirectional-translation MEMS deformable mirror lever actuator
Keywords:
双向平动MEMS变形镜杠杆驱动器
分类号:
-
DOI:
-
文献标识码:
A
摘要:
A novel electrostatic micro-electro-mechanical-system(MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process.
Abstract:
 设计了一种新型静电驱动双向平动的MEMS变形镜,其结构包括3部分:中央下电极,4个静电驱动杠杆结构以及反射镜面(上电极).该变形镜有两种驱动模式:向下驱动模式和向上驱动模式.在向上驱动时,4个杠杆结构实现了位移的放大;向下驱动时,利用了非线性弹性系数法扩展了镜面的平动范围.采用表面硅工艺完成了变形镜的加工.通过白光干涉仪对变形镜的测试表明:在向上驱动模式下,变形镜在驱动电压为31 V时位移达到1.1 μm;在向下驱动模式下,变形镜在6 V的驱动电压下位移达到1.1 μm.变形镜的总行程为2.2 μm,达到了同样工艺下传统变形镜的3倍左右.

参考文献/References

备注/Memo

备注/Memo:
更新日期/Last Update: 2012-11-14